Home “Bonding structure and etching characteristics of amorphous carbon for a hardmask deposited by DC sputtering”
저자
So-Yeon Lee, Kyung-Tae Jang, Min-Woo Jeong, Sungtae Kim, Hwanyeol Park, Kuntae Kim, Gun-Do Lee, Miyoung Kim, Young-Chang Joo
저널 정보
출간연도
Carbon, Volume 154, December 2019, Pages 277-284 (2019.12)
링크
https://doi.org/10.1016/j.carbon.2019.08.013
