"Boron-doped amorphous carbon deposited by DC sputtering for a hardmask: Microstructure and dry etching properties"

“Boron-doped amorphous carbon deposited by DC sputtering for a hardmask: Microstructure and dry etching properties”

Home “Boron-doped amorphous carbon deposited by DC sputtering for a hardmask: Microstructure and dry etching properties”

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Sungtae Kim, Ung-gi Kim, Jinseok Ryu, Dokyun Kim, Miyoung Kim, Young-Chang Joo, So-Yeon Lee

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출간연도

Applied Surface Science Volume 637, 15 November 2023, 157895

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