"Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system"

“Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system”

Home “Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system”

저자

Sungtae Kim, Min-Woo Jeong, Kuntae Kim, Ung-gi Kim, Miyoung Kim, So-Yeon Lee, Young-Chang Joo

저널 정보

출간연도

RSC Adv., 2023,13, 2131-2139

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