Home “Electron energy-loss spectroscopy analysis of HfO2 dielectric films on strained and relaxed SiGe/Si substrates”
저자
Jiyoung Jang, Tae Joo Park, Ji-Hwan Kwon, Jae Hyuck Jang, Cheol Seong Hwang and Miyoung Kim
저널 정보
출간연도
Applied Physics Letters, 92, 232906 (2008)
링크
https://aip.scitation.org/doi/abs/10.1063/1.2938877
