Home “High-resolution strain measurement in shallow trench isolation structuresusing dynamic electron diffraction”
저자
Miyoung Kim, Jian-Min Zuo, and Gyeong-Su Park
저널 정보
출간연도
Applied Physics Letters, 84, 2181 (2004)
링크
https://aip.scitation.org/doi/abs/10.1063/1.1687451
