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“Improvement of the current-voltage characteristics of a tunneling dielectric by adopting a Si3N4 /SiO2/Si3N4 multilayer for flash memory application”

“Improvement of the current-voltage characteristics of a tunneling dielectric by adopting a Si3N4 /SiO2/Si3N4 multilayer for flash memory application”

저자

Sug Hun Hong, Jae Hyuck Jang, Tae Joo Park, Doo Seok Jeong, Miyoung Kim, and Cheol Seong Hwanga, Jeong Yeon Won

저널 정보

출간연도

APPLIED PHYSICS LETTERS, 87, 152106, (2005)