Home “Spontaneous formation of Ge nanocrystals with the capping layer of Si3N4 by N2+ implantation and rapid thermal annealing”
저자
Min-Cherl Jung, Young Mi Lee, Hyun-Joon Shin, Deok-Hwang Kwon, Miyoung Kim, Changhun Ko, Moonsup Han, Yongsup Park
저널 정보
출간연도
Thin Solid Films, 518, 6010-6014 (2010)
링크
https://doi.org/10.1016/j.tsf.2010.06.045
