“Three-dimensional imaging of individual hafnium atoms inside a semiconductor device”
Home“Three-dimensional imaging of individual hafnium atoms inside a semiconductor device”
Home“Three-dimensional imaging of individual hafnium atoms inside a semiconductor device”
“Three-dimensional imaging of individual hafnium atoms inside a semiconductor device”
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Klaus van Benthem, Andrew R. Lupini, Miyoung Kim, Hion Suck Baik, SeokJoo Doh, Jong-Ho Lee, Mark P. Oxley, Scott D. Findlay, Leslie J. Allen, Julia T. Luck, and Stephen J. Pennycook
